접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
Handy type
비접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
In-line Type
Handy type
캐리어 라이프타임측정기
PN판정기
웨이퍼 두께측정기
Manual Type
Semi Auto Type
프로브헤드
확산저항측정기(SRP)
이미지센서 CIS 테스터
표준샘플
제품별 제품별
Manual Res/thickness measurement system
EC-80SCAN
- Rs : 0.01~3000 Ω/sq
- Res : 0.001~200 Ω·cm
- Thickness : 150~350 μm or 350~750 μm 
- A...
Manual resistivity, thickness, PN measurement...
EC-80TPN
- Rs : 0.01~3000 Ω/sq
- Res : 0.001~200 Ω·cm
- Thickness : 150~250 μm 
- Applications : Sili...
Semi-auto Rs measurement system
NC-80M
- Rs : 5.0mΩ/sq~1Ω/sq (option : up to 20Ω/sq)
- Applications : Al or other metal layers on silic...
Non-contact sheet resistance mapping system
NC-300SCAN
- Rs : 0.05~2 Ω/sq
- Applications : Cu film on silicon wafer (silicon wafer t : approx. 750μm)
...

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