- Single sided eddy current probe(upper side) with air flouting
    - Diameter of probe : 10mm
    - Measuring range : 0.05 ~ 2 ohm/sq (at film thickness : approx.2000A)

 - Performance:
    - Conforms to ASTM F673
    - Measurement repeatability
         CV : less than 0.2% (30 times in stop condition) [CV=STDEVP/AVG×100(%)]

 - Probing stage
   - High speed Y-θaxes motor controlled
         The measurement is performed from the circle of edge to inside, 
          and the final is the center.
         Tact time : less than 90sec./121 points
   - Mechanical accuracy of stage
         θ-axis : repeatability of positional precision：±0.01°
         Y-axis : repeatability of positional precision：±0.05mm
   - The distance between single side probe and stage：12.5mm