접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
Handy type
비접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
In-line Type
Handy type
캐리어 라이프타임측정기
웨이퍼 Flatness / Resistivity
PN판정기
웨이퍼 두께측정기
Manual Type
Semi Auto Type
프로브헤드
확산저항측정기(SRP)
이미지센서 CIS 테스터
표준샘플
제품별 제품별
Semi-auto Res/thickness measurement system
NC-20
- Rs : 0.01~3,000Ω/sq
- Res : 0.001~200Ω·cm
- Applications : Silicon wafer, Solar cell (Silicon wafer, Thin film)
- Wafer sizes : 3 inch∼8 inch, ∼156mmSQ
                      (Option; 2 inch and/or 12 inch, ∼210 mmSQ)




- Well suited to silicon wafer of solar cell and/or reclaimed wafers

- Eddy current method for resistivity, Electric capacitance method for
  wafer thickness
  (NC-22 for Resistivity with conductivity (P/N) check is available)


- 1 point measurement of center position

- Temperature correction for silicon wafer function