접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
Handy type
비접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
In-line Type
Handy type
캐리어 라이프타임측정기
웨이퍼 Flatness / Resistivity
PN판정기
웨이퍼 두께측정기
Manual Type
Semi Auto Type
프로브헤드
확산저항측정기(SRP)
이미지센서 CIS 테스터
표준샘플
장비통합솔루션(측정모듈)
접촉식 면저항
비접촉식 면저항
PN판정
제품별 제품별
Semi-auto Rs/Res. measurement instrument
NC-10
- Rs : 0.01~3000Ω/sq
- Res : 0.001~200Ω·cm
- Applications : Silicon wafer, GaAs Epi, GaN, GaP, InP, ITO and metal layers
- Sample sizes :  3”~8"Ф and up to 156mmSQ (option : 2"Ф, 12"Ф, or 210mmSQ)


- Easy operation non-contact resistivity/sheet resistance measuring instrument 

- No damage measurement by non-contact eddy current method

- Small-footprint and data processing by PC
 

- Replaceable sensors of Middle and High by meas. Range
  (Option: Low, S/High, Solar cell)


- 1 point measurement of center position

- 5 types of model for each measuring range

- Temperature correction for silicon wafer function

- Thickness measuring instrument of the same type is available with static capacitance probe,  and Thickness range 150μm ~ approx.800μm  (NC-10T)

- Combination tool for resistivity and thickness is available (NC-20)

- Res : Low – 0.001~0.05 Ω·cm                  Rs : Low – 0.01~0.5 Ω/sq
         
Middle – 0.05~0.5 Ω·cm                           Middle – 0.5~10 Ω/sq
          
High – 0.5~60 Ω·cm                                 High – 10~1000 Ω/sq
         
Super High – 60~200 Ω·cm                      Super High – 1000~3000 Ω/sq
         
Solar Wafer – 0.2~15 Ω·cm                      Solar - 5~500 Ω/sq