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Semi-auto Rs/Res. measurement instrument |
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NC-10 |
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- Rs : 0.01~3000¥Ø/sq
- Res : 0.001~200¥Ø¡¤cm
- Applications : Silicon wafer, GaAs Epi, GaN, GaP, InP, ITO and metal layers
- Sample sizes : 3¡±~8"¬¶ and up to 156mmSQ (option : 2"¬¶, 12"¬¶, or 210mmSQ)
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- Easy operation non-contact resistivity/sheet resistance measuring instrument
- No damage measurement by non-contact eddy current method
- Small-footprint and data processing by PC
- Replaceable sensors of Middle and High by meas. Range (Option: Low, S/High, Solar cell)
- 1 point measurement of center position
- 5 types of model for each measuring range
- Temperature correction for silicon wafer function
- Thickness measuring instrument of the same type is available with static capacitance probe, and Thickness range 150¥ìm ~ approx.800¥ìm (NC-10T)
- Combination tool for resistivity and thickness is available (NC-20)
- Res : Low – 0.001~0.05 ¥Ø¡¤cm Rs : Low – 0.01~0.5 ¥Ø/sq Middle – 0.05~0.5 ¥Ø¡¤cm Middle – 0.5~10 ¥Ø/sq High – 0.5~60 ¥Ø¡¤cm High – 10~1000 ¥Ø/sq Super High – 60~200 ¥Ø¡¤cm Super High – 1000~3000 ¥Ø/sq Solar Wafer – 0.2~15 ¥Ø¡¤cm Solar - 5~500 ¥Ø/sq
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