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Non contact Rs measurement system |
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NC-50/RG-1200S |
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- Rs : 3¥Ø/sq~2000¥Ø/sq or 3m¥Ø/sq~1¥Ø/sq
(option : up to 3000¥Ø/sq)
- Applications : Conductive layer on glass
TFT, EL(OLED), CF, Metal thin film, n+a-Si layer, Solar cell
- Glass sizes : 680mm X 880mm ~ 2200mm X 2500mm |
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- Inclined measuring stage with X and Y axes probe scanning with non-destroy eddy current probes
- Designed with working and space efficiency
- Self-test function,measurement position correction and wide range measurement
- 0.1 mm measurement position resolution and programmable test pattern - Vacuum areas are divided by 4~6 zones - CIM(host) communication and 2-D/3-D Mapping software - 4 point probe meas. system is available
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