접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
Handy type
비접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
In-line Type
Handy type
캐리어 라이프타임측정기
PN판정기
웨이퍼 두께측정기
Manual Type
Semi Auto Type
프로브헤드
확산저항측정기(SRP)
이미지센서 CIS 테스터
표준샘플
제품별 제품별
Hand held instrument(Rs/Res)
EC-80P (Portable)
- Rs : 0.01~3000Ω/sq
- Res : 0.001~200Ω·cm
- Applications : Silicon wafer, GaAs Epi, GaN, GaP, InP, ITO and metal layers
- Size : Any kinds of sizes (more than 14 mm)


- Hand held eddy current probe measurement instrument 

- 3 Measurement modes for wafer resistivity, bulk resistivity and sheet resistance

- Resistivity probe can be changed by sample's range

- Possible to add PN measurement probe (EC-80P-PN)

- 5 types of model for each measuring range

- Res : Low – 0.001~0.05 Ω·cm                      Rs : Low – 0.01~0.5 Ω/sq
          
Middle – 0.05~0.5 Ω·cm                              Middle – 0.5~10 Ω/sq
           
High – 0.5~60 Ω·cm                                    High – 10~1000 Ω/sq
          
Super High – 60~200 Ω·cm                         Super High – 1000~3000 Ω/sq
           Solar Wafer – 0.2~15 Ω·cm                         Solar - 5~500 Ω/sq