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4 point probe head
Cartridge type (Napson Original type)
Napson 4-point resistivity / sheet resistance systems are using high performance probe heads which are made by Jandel Engineering Limited of England. Jandel probe head performs high precise measurement of resistivity and sheet resistance for silicon wafers, epitaxial layers, diffusion layers, ITO layers, metal layers and more, so that Jandel probes have a good evaluation for many years.


*Load (needle pressure) is always suitable since using V type spring *Probe spacing accuracy and probe stability is excellent since anodized aluminum alloy upper and lower guides are jeweled
*Less damage of probe needle tips - Solid tungsten carbide needles for superior durability


The probe type is chosen under the material of measuring sample, the surface state, the form etc.

(Reference)

Sample surface

Probe head
(Material/Radius)

Load
/Needle

Silicon Ingots / Block

TC-40u

200g

Silicon Slice

TC-40u

200g

Epitaxial Layers

TC-150u

100g

Epitaxial Layers (Thin film)

TC-150u, 500u

50g

Shallow Diffused -layers (Thin film)

OS-200u, 500u

50g

Diffused Layers

OS-200u
TC-150u

100g

Ion Implantation

TC-150u

50g, 100g

Metal (Thin film), ITO

TC-150u, 500u

25g, 50g
100
£ç

*The other types are available.
*If you would like to have a special spec, contact us.

(Specifications)
TC-40u-200g/1.00mm
- Needle Material: TC (Tungsten carbide)
¡¡¡¡¡¡ (TC or OS: Osmiun alloy)¡¡
- Radius: 40 um (25 um to 500 um)
- Loads (g/needle): 200
£ç¡¡(10g to 250g)
¡¡ - Spacing: 1.00 mm¡¡¡¡¡¡ (0.5 mm to 1.59 mm)¡¡
¡¡¡¡- Arrangement: Linear (standard)¡¡
¡¡¡¡¡¡ (Square is available)