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Semi Auto Type
Full Auto Type
Handy type
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Manual Type
Semi Auto Type
Full Auto Type
In-line Type
Handy type
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Semi Auto Type
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Noncontact PN type checker(built-in model)
PN-80¥á
- Range : 0.1~1k¥Ø¡¤cm
- Applications : Silicon wafer (Lapped, Etched, Polished, Mirror, Bulk)
- Sample sizes : 50~300mm¦





- Built-in conductivity (P/N) checker model to an automatic wafer
   loading system


- Principle: Photovoltaic effect by light pulse irradiation


- No damage and no stain by Non-contact method

- Possible to check even oxidized film on wafer surface

- Instantly discrimination by optical pulse illuminate