- Principle : Photovoltaic effect by light pulse irradiation

- No damage and no stain by Non-contact method

- Possible to check even oxidized film on wafer surface

- Instantly discrimination by optical pulse illuminate

Applications

- Semiconductor materials, Solar-cell materials (Silicon, Polysilicon)

Sample size

- more than 30 x 30mm

Measuring range

- PN Checking range in resistivity : 0.1 ~ 1,000 ohm-cm