The system automatically measures resistivity, thickness and P/N of silicon wafers without contacting. The system provides high throughput, cassette wafer measurement/sorting and is designed/manufactured by NAPSON.
- High speed and clean wafer robot
- Non-contact measurement for resistiviity, thicknes and P/N type of silicon wafers
- High precision and high stability measurement
- Stanard 7 cassette stations for loader/unloader (CCW rotary mechanism)
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