접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
Handy type
비접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
In-line Type
Handy type
캐리어 라이프타임측정기
PN판정기
웨이퍼 두께측정기
Manual Type
Semi Auto Type
프로브헤드
확산저항측정기(SRP)
이미지센서 CIS 테스터
표준샘플
제품별 제품별
Full Auto Resistivity measurement system
WS-8800
- Res : 1μ~1M Ω·cm
- Rs : 1m~10M Ω/sq
- Applications : Silicon wafer, Semiconductor process
                      (Metal thin film, Diffused, Ion-implanted, Epitaxial, Poly silicon)
- Size : 3"~8"Ф or 8"~12"Ф



- Fully automatic handling/measuring system for resistivity and sheet resistance with robot and non-contact aligner

- Self-test function, position correction and wide range measurement

- Using high performance RT-3000 tester

- Wafer thickness, PN type checking and temperature measurement for silicon wafer

- 1.0mm distance from edge can be measured

- Both of sheet resistance and film thickness are displayed (metal layer)

- 200mm SMIF or 300MM FOUP compatible (option)

- Max. 1225 points 2-D/3-D mapping software (option)