- Possible to measure wide range of sheet resistance by installing Max. 4 probes - Min. 7mm position from edge can be measured - User programable measurement pattern & programmable measuring pattern - Equipped with one cassette station to improve work efficiency (storage in the same slot after measurement)
* Option : thickness measurement probe (for silicon wafer)
Sample sizes
- 3~8 inch
Measuring range
- [R] 1m~200 ohm-cm - [RS] 10m~3000 ohm/sq
* The range is separated from each Low, Middle, High and Super High probe type.
* Please refer the measurement range for each probe type as below
(1) Low : 0.1~0.5 ohm/sq (0.001~0.05 ohm-cm) (2) Middle : 0.5~10 ohm/sq (0.05~0.5 ohm-cm) (3) High : 10~1000 ohm/sq (0.5~60 ohm-cm) (4) S-High : 1000~3000 ohm/sq (60~200 ohm-cm)
Video
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비접촉식 면저항측정기
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