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Resistivity Reference Wafer
NRW Series
NRW series are resistivity reference wafers which proven by Napson’s resistivity measurement system. NRW series use wafers with neutron irradiation, and excellent stability.












NRW series are resistivity reference wafers which proven by Napson’s resistivity
measurement system. NRW series use wafers with neutron irradiation, and excellent
stability.

Napson’s four-probe resistivity measurement system has been calibrated by standard
wafers (NIST, VLSI), and conforms to the standards stipulated by the following SEMI
standards, Japanese Industrial Standards (JIS) and American Materials Testing
Association (ASTM).


Compliance standards

[SEMI Standards]
 SEMI-MF43-99, SEMI-MF374-02, SEMI-MF84-02, SEMI-MF1529-02

[American Society for Testing and Materials]
 ASTM-F-84-99(SEMI-MF84), ASTM-F-374-00a,  ASTM-F-390-11, ASTM-F-1529-97

[Japan Industrial Standards]
JIS-H-0602-1995


Applications

- Material : Silicon
- Production method : FZ
- Wafer finish frontside/backside : Lapped
- Wafer orientation : (1-1-1) ± 1 deg.
- Doping : N-type (Phosphorous)
- Wafer size : Φ100mm(4inch)
- Wafer Thickness : *Depends on NRW wafer type. Please refer following specs.


Wafer Types / Specifications


  * Value of sheet resistance[ohm/sq] is a calculated value calculated from the
     resistivity provided by the manufacturer and the wafer thickness.
     Actual sheet resistance varies depending on wafer individual. 
 

Guaranteed accuracy of Resistivity