접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
Handy type
비접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
In-line Type
Handy type
캐리어 라이프타임측정기
PN판정기
웨이퍼 두께측정기
Manual Type
Semi Auto Type
프로브헤드
확산저항측정기(SRP)
이미지센서 CIS 테스터
표준샘플
비접촉식 면저항측정기 제품별 > 비접촉식 면저항측정기
Non-contact Ultra-High range Rs measurement system
CRN-100
- Rs : 10E+9 ~ 10E+15 Ω/sq
- Applications : Any sample within the measurement range can be measured
- Wafer sizes : Max. 300 x 400 mm (or more)















- Non-contact Ultra-High range sheet resistance measurement
  for 10E+9 ~ 10E+15 ohm/sq without contacting(Corona discharge method)

-  The probe
is composed of a grid type corona charger and a surface voltmeter
   located next to the charger. A
test material was placed below the probe without
   contact to the material at a gap of 2 mm.

- Mapping program software;
  1. Arranged in a multipoint pattern measurement is programmed
  2. 2-D & 3-D mapping software
  3. Easy operation by Windows 7 system software
  4.
Measurement data base link with Excel via CSV format file
  5. Unaffected by contact resistance

*Corona Discharge Method : Pat. No.5510629
  Joint development with Yamagata Univ.
  (Associate Professor : Dr. Toshiyuki Sugimoto)


Applications




Any sample within the measurement range can be measured.
- Thin film layer (a-Si, IGZO etc)
-
Coating material
-
Semiconductor material
- Approximate material as Insulator
 * Please contact us for details.


Sample sizes

- Size : Max. 300 x 400 mm (or more)
- Thickness : Max. 2 mm

 * We can design as your requirement. Please contact us for customize.


Measuring range

10E+9 ~ 10E+15 ohm/sq