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비접촉식 면저항측정기
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비접촉식 면저항측정기 제품별 > 비접촉식 면저항측정기
Non-Contact (Pulse-Voltage excitation method) Ultra-Low Rs measurement system
PVE-80
- Rs : 50u~1mΩ/sq
- Applications : Metal films (Ag , Cu , Au , Al or others)
- Size : ~W300 x D210mm











- No damage measurement by non-contact Pulse-Voltage excitation method
- Easy to measure & carry around, Removable stage plate
- Easy operation and data processing by PC with Software
- Measurement result can shown by 3 types of measurement unit
  (Sheet resistance[Ohm/Sq], Electric conductivity[S/cm], Electrical conduction[S])

* Pulse-Voltage excitation method : Pat. No.5386394
   Joint development with Chiba Univ.


Applications

- New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc)
- Conductive thin film (Metal, ITO etc)
- Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc)
- Others (*Please contact us for details)


Sizes

- Sample size : ~W300 x D210mm
- Spot size : 14mm
- Gap : 2mm (Distance between upper and lower probe)


Measuring range

- Rs : 50μ ~ 1m Ω/sq