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Non-Contact (Pulse-Voltage excitation method) Ultra-Low Rs measurement system |
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PVE-80 |
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- Rs : 50u~1m¥Ø/sq
- Applications : Metal films (Ag , Cu , Au , Al or others)
- Size : ~W300 x D210mm |
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- No damage measurement by non-contact Pulse-Voltage excitation method - Easy to measure & carry around, Removable stage plate - Easy operation and data processing by PC with Software - Measurement result can shown by 3 types of measurement unit (Sheet resistance[Ohm/Sq], Electric conductivity[S/cm], Electrical conduction[S])
* Pulse-Voltage excitation method : Pat. No.5386394 Joint development with Chiba Univ.
Applications
- New materials, functional materials (Carbon nanotube, DLC, graphene, Ag nanowire etc) - Conductive thin film (Metal, ITO etc) - Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc) - Others (*Please contact us for details)
Sizes
- Sample size : ~W300 x D210mm - Spot size : 14mm - Gap : 2mm (Distance between upper and lower probe)
Measuring range
- Rs : 50¥ì ¢¦ 1m ¥Ø/sq
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