접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
Handy type
비접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
In-line Type
Handy type
캐리어 라이프타임측정기
PN판정기
웨이퍼 두께측정기
Manual Type
Semi Auto Type
프로브헤드
확산저항측정기(SRP)
이미지센서 CIS 테스터
표준샘플
웨이퍼 두께측정기 제품별 > 웨이퍼 두께측정기
Wafer 두께측정기 (Semi Auto Type)
FLA-200
-Thickness : 200 –1200μm / Bow : +/-350μm / Warp : 350μm
- Applications : Semiconductor materilas, Solar-cell materials (Silicon, Polysilicon, SiC etc)
                    Silicon-related epitaxial materials, Ion-implantation sample
                    Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc) 
- Sample sizes : 3~8 inch















- Measures Thickness, TTV, Bow, Warp and site and global Flatness (ASTM compliance)

- Measures all materials including Si, GaAs, Ge, InP, SiC

- Full 500 micron thickness measurement range without re-calibration

- 2-D /3-D Mapping software