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Manual Type
Semi Auto Type
Full Auto Type
In-line Type
Handy type
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Wafer µÎ²²ÃøÁ¤±â (Semi Auto Type)
FLA-200
-Thickness : 200 –1200¥ìm / Bow : +/-350¥ìm / Warp : 350¥ìm
- Applications : Semiconductor materilas, Solar-cell materials (Silicon, Polysilicon, SiC etc)
                    Silicon-related epitaxial materials, Ion-implantation sample
                    Chemical compound semiconductor (GaAs Epi, GaN Epi, InP, Ga etc) 
- Sample sizes : 3~8 inch















- Measures Thickness, TTV, Bow, Warp and site and global Flatness (ASTM compliance)

- Measures all materials including Si, GaAs, Ge, InP, SiC

- Full 500 micron thickness measurement range without re-calibration

- 2-D /3-D Mapping software