- Hand held eddy current probe measurement instrument
- 3 Measurement modes for wafer resistivity, bulk resistivity and sheet resistance
- Resistivity probe can be changed by sample's range
- Possible to add PN measurement probe (EC-80P-PN)
- 5 types of model for each measuring range
- Res : Low – 0.001~0.05 ¥Ø¡¤cm Rs : Low – 0.01~0.5 ¥Ø/sq Middle – 0.05~0.5 ¥Ø¡¤cm Middle – 0.5~10 ¥Ø/sq High – 0.5~60 ¥Ø¡¤cm High – 10~1000 ¥Ø/sq Super High – 60~200 ¥Ø¡¤cm Super High – 1000~3000 ¥Ø/sq Solar Wafer – 0.2~15 ¥Ø¡¤cm Solar - 5~500 ¥Ø/sq
|