
- Display resistivity and thickness of a silicon wafer with one measurement
- Possible to measure a continuous one line for the resistivity and thickness of a wafer by the SCAN measurement mode
- Operator can handle the wafer easily by the air floating measurement stage
- Measurement data saving and transfer the text file to PC (via RS-232C)
- Easy set up to measurement condition by JOG dial operation
- With temperature correction for silicon wafers
- Res : Low – 0.001~0.05 Ω·cm Rs : Low – 0.01~0.5 Ω/sq Middle – 0.05~0.5 Ω·cm Middle – 0.5~10 Ω/sq High – 0.5~60 Ω·cm High – 10~1000 Ω/sq Super High – 60~200 Ω·cm Super High – 1000~3000 Ω/sq Solar Wafer – 0.2~15 Ω·cm Solar - 5~500 Ω/sq
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