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 제조사별 |
 제조사별 |
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Hand held instrument(Rs/Res) |
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EC-80P (Portable) |
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- Rs : 0.01~3000Ω/sq
- Res : 0.001~200Ω·cm
- Applications : Silicon wafer, GaAs Epi, GaN, GaP, InP, ITO and metal layers
- Size : Any kinds of sizes (more than 14 mm) |
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 - Hand held eddy current probe measurement instrument
- 3 Measurement modes for wafer resistivity, bulk resistivity and sheet resistance
- Resistivity probe can be changed by sample's range
- Possible to add PN measurement probe (EC-80P-PN)
- 5 types of model for each measuring range
- Res : Low – 0.001~0.05 Ω·cm Rs : Low – 0.01~0.5 Ω/sq
Middle – 0.05~0.5 Ω·cm Middle – 0.5~10 Ω/sq
High – 0.5~60 Ω·cm High – 10~1000 Ω/sq
Super High – 60~200 Ω·cm Super High – 1000~3000 Ω/sq
Solar Wafer – 0.2~15 Ω·cm Solar - 5~500 Ω/sq
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