- Recipe setting, measurements and data processing with easy PC operation

- Test patterns: user programmable (Shape: Round / Square)

- Tester self-test function, wide measuring range

- 2 types measuring tester (S version: Standard type,
                                          H version: High range resistivity measurement type)

- Mapping software: Up to 1,225 points (Option)

- Thickness / Edge / Temperature correction for resistivity