Napson Corporation
Jandel Engineering Limited
MTI Instruments
Jova Solutions
제조사별 제조사별
Semi-auto Rs/Res. measurement system
CRESBOX
- Rs:5.0mΩ/sq~10.0MΩ/sq
- Res:1.0mΩ•cm ~300kΩ•cm ( t=100~2000μm )
- Applications : Silicon wafer, conductive layer on glass/film and more
- Sample size : 2"~8"Ф, max.156mmSQ




- All-in-one instrument of resistivity tester and measuring stage
  (Small foot print)

- Without PC operation (stand-alone use) or PC operate system type
   is available

- Shutter mechanism guard measurement from outside influence

- Round and square shape measuring pattern programmable
  (in use PC operate)

- Tester self-test function, wide measuring range

- Thickness, edge, temperature correction for silicon wafer

- Film thickness conversion function from sheet resistance (in use PC operate)

- Mapping software: Up to 1,225 points (Option)