Napson Corporation
Jandel Engineering Limited
MTI Instruments
Jova Solutions
제조사별 제조사별
Manual resistivity, thickness, PN measurement instrument
EC-80TPN
- Rs : 0.01~3000 Ω/sq
- Res : 0.001~200 Ω·cm
- Thickness : 150~250 μm 
- Applications : Silicon wafer, GaAs Epi, GaN, GaP, ITO and metal layers
- Size : 2"~8", or Max. 156mmSQ





- Easy operation and compact design

- Auto-measurement start by inserting a wafer under the sensor

- Easy mode change of resistivity and sheet resistance measurement

- Easy set up to measurement condition by JOG dial

- All-in one tool for simulaneous resistivity, thickness, and PN measurement

- 5 sites measurement mode for resistivity and thickness (option)

- 5 types of model for each measuring range

- Res : Low – 0.001~0.05 Ω·cm                         Rs : Low – 0.01~0.5 Ω/sq
            Middle – 0.05~0.5 Ω·cm                                 Middle – 0.5~10 Ω/sq
            High – 0.5~60 Ω·cm                                       High – 10~1000 Ω/sq
            Super High – 60~200 Ω·cm                            Super High – 1000~3000 Ω/sq
            Solar Wafer – 0.2~15 Ω·cm                            Solar - 5~500 Ω/sq