Napson Corporation
Jandel Engineering Limited
MTI Instruments
Jova Solutions
제조사별 제조사별
Manual Rs/Res. measurement instrument
EC-80
- Rs : 0.01~3000Ω/□
- Res : 0.001~200Ω·cm
- Applications : Silicon wafer, GaAs Epi, GaN, GaP, ITO and metal layers
- Size : 2"~8", or Max. 156mmSQ



- Easy operation and compact design

- Auto-measurement start by inserting a wafer under the sensor

- Easy mode change of resistivity and sheet resistance measurement

- Easy set up to measurement condition by JOG dial

- 5 types of model for each measuring range

- Res : Low – 0.001~0.05 Ω·cm                  Rs : Low – 0.01~0.5 Ω/sq
          Middle – 0.05~0.5 Ω·cm                           Middle – 0.5~10 Ω/sq
          High – 0.5~60 Ω·cm                                High – 10~1000 Ω/sq
          Super High – 60~200 Ω·cm                     Super High – 1000~3000 Ω/sq
         
Solar Wafer – 0.2~15 Ω·cm                     Solar - 5~500 Ω/sq