Napson Corporation
Jandel Engineering Limited
MTI Instruments
Jova Solutions
제조사별 제조사별
Hand held instrument(Rs/Res)
EC-80P (Portable)
- Rs : 0.01~3000Ω/sq
- Res : 0.001~200Ω·cm
- Applications : Silicon wafer, GaAs Epi, GaN, GaP, InP, ITO and metal layers
- Size : Any kinds of sizes (more than 14 mm)


- Hand held eddy current probe measurement instrument

- 3 Measurement modes for wafer resistivity, bulk resistivity and sheet resistance


- Resistivity probe can be changed by sample's range

- Possible to add PN measurement probe (EC-80P-PN)

- 5 types of model for each measuring range

- Res : Low – 0.001~0.05 Ω·cm                    Rs : Low – 0.01~0.5 Ω/sq
            Middle – 0.05~0.5 Ω·cm                            Middle – 0.5~10 Ω/sq
            High – 0.5~60 Ω·cm                                   High – 10~1000 Ω/sq
            Super High – 60~200 Ω·cm                       Super High – 1000~3000 Ω/sq
           
Solar Wafer – 0.2~15 Ω·cm                       Solar - 5~500 Ω/sq