- Principle : Contact thermo-electromotive force method (seebek effect)

- Thermo electrode and cold electrode is mounted detecting part of
  measuring probes

- Possible to check most figure of sample such as Silicon wafer, Bulk,
  Ingot and so on
  (Oxidized film on wafer surface is not available)

- Thermometer and analogue trimmer (meter) in measurement unit

- PN-12β: Built-in module with vacuum contact on measuring stage