Napson Corporation
Jandel Engineering Limited
MTI Instruments
Jova Solutions
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Wafer lifetime tester
HF-300
- Measuring range : 0.1¥ìS-1000¥ìS (*Compatioble to resistivity range : 0.1~1000¥Ø•cm)
- Applications : Silicon wafer, brick (bulk)
- Sample sizes : Wafer - [Square] ~210mmSQ
                                    [Circle] ~200mm
                        Brick - Max. 210(W) x 500(D) x 210(H) mm



- Non-contact, non-damage lifetime measurement by ¥ì-PCD

- Suitable for mono-crystalline and poly-crystalline silicon wafer

- Passivation waith exclusive capsule (for wafer sample)

- [Laser unit]
- Type : Semiconductor laser diode
- Wave length : 905nm (for wafer) / 1000nm (for brick)
- Peak power : 60W
- Pulse width : 80nS

- Resistivity measurement [4PP or N] (option)