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Inline Non-contact Res., PN, thickness and lifetime measurement |
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NC-100PV |
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- Res : 0.1~15 ¥Ø•cm
- Rs : 5~750 ¥Ø/sq
- Thickness : 100~500 ¥ìm
- Applications : Silicon wafer (Mono-crystalline, Poly-crystalline)
- Wafer sizes : 126, 156, 210mmSQ (PSQ) |
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- In-line on-the-fly measurement module for solar silicon wafer
- Possilble to measure Resistivity and/or Thickness by each module without contact
- Lifetime measurement module (option)
- PN type checker module (option)
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