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Full Auto wafer sorting system |
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NC-6800 |
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- Res : 0.001¡60¥Ø¡¤cm
- Thickness : 150¡800¥ìm
- PN : 0.1~1000¥Ø¡¤cm in resistivity
- Applications : Silicon wafer (Raw slice, Lapped, Mirror, Etched, Polished)
- Wafer sizes : 3"~8"¦ or 8"~12"¦ |
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The system automatically measures resistivity, thickness and P/N of silicon wafers without contacting. The system provides high throughput, cassette wafer measurement/sorting and is designed/manufactured by NAPSON.
- High speed and clean belt tranfer system
- Non-contact measurement ensures no damage to wafers
- High precision and high stability measurement
- Temporature correction
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