Napson Corporation
Jandel Engineering Limited
MTI Instruments
Jova Solutions
제조사별 제조사별
Semi-auto Res/thickness measurement system
NC-20
- Rs : 0.01~3,000Ω/sq
- Res : 0.001~200Ω·cm
- Applications : Silicon wafer, Solar cell (Silicon wafer, Thin film)
- Wafer sizes : 3 inch∼8 inch, ∼156mmSQ
                      (Option; 2 inch and/or 12 inch, ∼210 mmSQ)



- Well suited to silicon wafer of solar cell and/or reclaimed wafers


- Eddy current method for resistivity, Electric capacitance method for
  wafer thickness
  (NC-22 for Resistivity with conductivity (P/N) check is available)


- 1 point measurement of center position

- Temperature correction for silicon wafer function