Napson Corporation
Jandel Engineering Limited
MTI Instruments
Jova Solutions
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Manual resistivity, thickness, PN measurement instrument
EC-80TPN
- Rs : 0.01~3000 ¥Ø/sq
- Res : 0.001~200 ¥Ø¡¤cm
- Thickness : 150~250 ¥ìm 
- Applications : Silicon wafer, GaAs Epi, GaN, GaP, ITO and metal layers
- Size : 2"~8", or Max. 156mmSQ




- Easy operation and compact design

- Auto-measurement start by inserting a wafer under the sensor

- Easy mode change of resistivity and sheet resistance measurement

- Easy set up to measurement condition by JOG dial

- All-in one tool for simulaneous resistivity, thickness, and PN measurement

- 5 sites measurement mode for resistivity and thickness (option)

- 5 types of model for each measuring range

- Res : Low – 0.001~0.05 ¥Ø¡¤cm            Rs : Low – 0.01~0.5 ¥Ø/sq
           Middle – 0.05~0.5 ¥Ø¡¤cm                    Middle – 0.5~10 ¥Ø/sq
           High – 0.5~60 ¥Ø¡¤cm                          High – 10~1000 ¥Ø/sq
           Super High – 60~200 ¥Ø¡¤cm               Super High – 1000~3000 ¥Ø/sq
           Solar Wafer – 0.2~15 ¥Ø¡¤cm               Solar - 5~500 ¥Ø/sq