- Display resistivity and thickness of a silicon wafer with one measurement

- Possible to measure a continuous one line for the resistivity and
  thickness of a wafer by the SCAN measurement mode

- Operator can handle the wafer easily by the air floating measurement stage

- Measurement data saving and transfer the text file to PC (via RS-232C)

- Easy set up to measurement condition by JOG dial operation

- With temperature correction for silicon wafers

- Res : Low – 0.001~0.05 Ω·cm                           Rs : Low – 0.01~0.5 Ω/sq
           Middle – 0.05~0.5 Ω·cm                                   Middle – 0.5~10 Ω/sq
           High – 0.5~60 Ω·cm                                          High – 10~1000 Ω/sq
           Super High – 60~200 Ω·cm                              Super High – 1000~3000 Ω/sq
           Solar Wafer – 0.2~15 Ω·cm                              Solar - 5~500 Ω/sq