- Fully automatic handling/measuring system for resistivity and sheet resistance with robot  and non-contact aligner

- Self-test function, position correction and wide range measurement

- Using high performance RT-3000 tester

- Wafer thickness, PN type checking and temperature measurement for silicon wafer

- 1.0mm distance from edge can be measured

- Both of sheet resistance and film thickness are displayed (metal layer)

- 200mm SMIF or 300MM FOUP compatible (option)

- Max. 1225 points 2-D/3-D mapping software (option)