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Manual Type
Semi Auto Type
Full Auto Type
In-line Type
Handy type
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Semi-auto resistivity measurement system
RT-3000/RG-15D
- Rs:1m~1G¥Ø/¡à
- Res:1¥ì~1M¥Ø¡¤cm
- Applications : Silicon ingot
- Ingot sizes : 50¡­205 mm in diameter
                    (Option; 305 mm in diameter)
                    (length/weight; 30¡­600 mm L / 50kg)




- Multi-point auto measurement of silicon ingot end face (Option: docking with ingot  handler)
- Tester self-test function, measurement position and temperature correction function

- Measurement for silicon ingot diameter and length

- High performance test result for high resistivity ingot up to 100 k ¥Ø·cm

- Silicon wafer measurement available