접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
Handy type
비접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
In-line Type
Handy type
캐리어 라이프타임측정기
웨이퍼 Flatness / Resistivity
PN판정기
웨이퍼 두께측정기
Manual Type
Semi Auto Type
프로브헤드
확산저항측정기(SRP)
이미지센서 CIS 테스터
표준샘플
제품별 제품별
Manual Rs/Res. measurement system
RT-70V/RG-7
- Rs:5.0mΩ/sq~10.0MΩ/sq
- Res:1.0μ~300.0kΩ•cm ( t=0.01~9999.99μm )
          0.5mΩ•cm~1.0MΩ•cm ( t > 9999.99μm )
- Applications : Silicon wafer, conductive layer on glass/film and more
- Sample sizes : up to 8"Ф (option : ~12"Ф)




- Stage (RG-7) : Electric probe up-down stroke

- Thickness input with easy JOG dial operation
  (RT-70V Tester)


- Tester self-test function/Auto change-over measurement range function

- 4 types measuring mode for each sample types

- Temperature correction for silicon resistivity measurement