접촉식 면저항측정기
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비접촉식 면저항측정기
Manual Type
Semi Auto Type
Full Auto Type
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Handy type
캐리어 라이프타임측정기
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Manual Type
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프로브헤드
확산저항측정기(SRP)
이미지센서 CIS 테스터
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비접촉식 면저항측정기 제품별 > 비접촉식 면저항측정기
Contactless resistivity mapping measurement system
COREMA - WT System
Resistivity Mapping, Mobility and Carrier Concentration Measurements for Semi-Insulating SiC, GaAs, InP, GaN and CdTe Wafers
















Resistivity Mapping, Mobility and Carrier Concentration Measurements for Semi-Insulating SiC, GaAs, InP, GaN and CdTe Wafers



The COntactless REsistivity MApper designed for Wafer Topography (COREMA - WT) is a high performance diagnostic tool to characterize the resistivity of semi-insulating semiconductor wafers with precision, repeatability and detail. Full wafer resistivity topograms show fluctuations in the percent range with lateral resolution below 1 mm. It is used for routine production control as well as in-depth analysis supporting material R&D. 


COREMA-WT System Specifcations:
 ・ SiC, GaAs, InP, GaN and other semi-insulating materials
 ・ Resistivity: 1E5 - 1E12 ohm-cm (Extended Range Version)
 ・
Fast, 1% Repeatability
 ・
Non-Destructive Measurement
 ・
No Sample Preparation 
 ・
Up to 200mm Wafer Size
 ・ High Resolution Topograms
 ・ For Wafer Production and Process Development
 ・
High Speed - Approx. 20 minutes per wafer